L-310 V6 Precision Z Stage Suitable for Vacuum

Can be Compactly Combined with Linear and Rotation Stages

  • Suitable for vacuum up to 10-6 hPa
  • Travel range 26 mm (1")
  • High-resolution encoder
  • Stepper motor
  • Zero-play ball screw
  • Load capacity to 5.5 kg
L-310 V6 Precision Z Stage Suitable for Vacuum
Product Description Specifications Downloads Quote / Order

Precision-class Z stage

High guiding accuracy and stiffness due to ball screws and crossed roller guides. Stress-relieved aluminum base for high stability. 2-phase stepper motor for high torque even at low velocities and high resolution Noncontact limit and reference switches (Hall effect). Reference switch with direction sensing in the middle of the travel range. Integrated linear encoder, installed centrically.

Highly accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Reduced outgassing especially for use in vacuum environments

Most notably, for the lubrication of the guides and the drive screw a material with particularly low outgassing is used. This allows a bakeout temperature of up to 80° C. With this and other modifications of the PI V6 vacuum class, this positioner can be used up to 10-6 hPa.

Application fields

Vacuum chambers. Research. Beamline instrumentation. Microscopy. Electronics assembly and inspection.

Specifications

Datasheet

Datasheet L-310-V

Version / Date
2022-05-25
pdf - 2 MB
Version / Date
2022-05-25
pdf - 2 MB

Downloads

Datasheet

Datasheet

Datasheet L-310-V

Version / Date
2022-05-25
pdf - 2 MB
Version / Date
2022-05-25
pdf - 2 MB

Documentation

Documentation

User Manual L310T0005

L-310.021211V6

Version / Date
2022-09-20
pdf - 439 KB
English
Documentation

Short Instructions MP146EK

Positioners with Electric Motors: DT-xx / HPS-170 / L-xxx / LS-xxx / PRS-xxx / RS-40 / UPL-120 / VT-80 / WT-xx / WT-xxx

Version / Date
3.0.0 2024-01-15
pdf - 261 KB
Version / Date
3.0.0 2024-01-15
pdf - 295 KB

3-D Models

3-D Models

3-D model L-310.021211V6

Version / Date
2019-12-06
zip - 3 MB

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.

L-310.021211V6

Vacuum compatible precision Z stage; 2-phase stepper motor; 26 mm travel range; 55 N load capacity; 7.5 mm/s maximum velocity; ball screw; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak; vacuum compatible to 10-6 hPa

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