P-620.Z - P-622.Z PIHera Vertical Precision Z Positioner

Variable Travel Ranges and Axis Configuration

P-620.Z - P-622.Z PIHera Vertical Precision Z Positioner
Product Description Specifications Downloads Quote / Order
  • Travel ranges 50 µm to 250 µm (350 µm open loop)
  • Resolution to 0.1 nm
  • Linearity error only 0.02 %
  • Direct metrology with capacitive sensors
  • X, XY, Z, XYZ versions

Fields of application

  • Interferometry
  • Microscopy
  • Nanopositioning
  • Biotechnology
  • Test applications
  • Semiconductor technology

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.

Suitable for sophisticated vacuum applications

All components used in the piezo systems are are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.

Specifications

Datasheet P-620.Z – P-622.Z

Version / Date
2018-04-16
Version / Date
2018-04-13
Version / Date
2018-06-13
Document language
pdf - 657 KB
pdf - 1 MB
pdf - 747 KB

Downloads

Datasheet

Datasheet P-620.Z – P-622.Z

Version / Date
2018-04-16
Version / Date
2018-04-13
Version / Date
2018-06-13
Document language
pdf - 657 KB
pdf - 1 MB
pdf - 747 KB

Documentation

User Manual PZ234

P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors
Version / Date
1.1.0 2018-08-07
Version / Date
1.1.0 2018-08-07
Document language
pdf - 3 MB
pdf - 3 MB

Short Instructions PZ240

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
Version / Date
5.0.0
pdf - 908 KB

3-D Models

P-62x.Z 3-D model

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