P-517 • P-527 Multi-Axis Piezo Scanner

High Dynamics Nanopositioner / Scanner with Direct Position Measuring

  • 2- and 3-axis versions (XY and XYθZ)
  • Travel ranges to 200 µm
  • Subnanometer resolution
P-517 • P-527 Multi-Axis Piezo Scanner
Product Description Specifications Downloads Quote / Order

Application fields

  • Metrology
  • Interferometry
  • Photonics / integrated optics
  • Lithography
  • Nanopositioning
  • Scanning microscopy
  • Sample alignment
  • Micromachining

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

High tracking accuracy in the nanometer range due to parallel position measuring

All degrees of freedom are measured against a single fixed reference. Undesired crosstalk between axes can be actively compensated (active guiding) in real time (depending on the bandwidth). High tracking accuracy is achieved in the nanometer range even in dynamic operation.

Specifications

Datasheet

Datasheet P-517 • P-527

Version / Date
2019-11-15
pdf - 398 KB
Version / Date
2019-11-15
pdf - 403 KB
Version / Date
2018-06-20
pdf - 707 KB
Version / Date
2018-07-02
pdf - 786 KB

Downloads

Product Note

Product Note

Product Change Notification Piezo Actuator Driven Products

Version / Date
2021-04-19
pdf - 377 KB
English

Datasheet

Datasheet

Datasheet P-517 • P-527

Version / Date
2019-11-15
pdf - 398 KB
Version / Date
2019-11-15
pdf - 403 KB
Version / Date
2018-06-20
pdf - 707 KB
Version / Date
2018-07-02
pdf - 786 KB

Documentation

Documentation

Short Instructions PZ240

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

Version / Date
6.1.0 10/2019
pdf - 1 MB
Version / Date
6.1.0 10/2019
pdf - 1 MB
Documentation

Technical Note P500T0002

Unpacking and Packing P-5xx Positioners

Version / Date
2019-03-04
pdf - 448 KB
English
Documentation

User Manual PZ82

P-517, P-518, P-527, P-528, P-558 Piezo Nanopositioning Systems with Capacitive Sensors

Version / Date
2013-09-05
pdf - 939 KB
Version / Date
2013-09-05
pdf - 938 KB

3-D Models

3-D Models

P-5x7 3-D model

zip - 221 KB

Quote / Order

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