P-733.2 XY Piezo Nanopositioner

High-Precision XY Scanner with Aperture

  • Travel ranges to 100 µm × 100 µm in X and Y
  • Resolution to 0.1 nm due to capacitive sensors
  • High velocity versions with direct drive
  • Vacuum-compatible and nonmagnetic versions on request
  • Parallel kinematics for higher accuracy and dynamics
  • Parallel metrology for active compensation of guiding errors
  • Zero-play, high-precision flexure guide system
  • Clear aperture 50 mm × 50 mm for transmitted-light applications
P-733.2 XY Piezo Nanopositioner
Product Description Specifications Downloads Quote / Order

Application fields

  • Scanning microscopy
  • Confocal microscopy
  • Mask/wafer positioning
  • Surface measuring technology
  • Nanoimprinting
  • Micromanipulation
  • Image processing / stabilization
  • Nanopositioning with high flatness and straightness of motion

Outstanding lifetime thanks to PICMA® piezo actuators

The PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.

High dynamics multi-axis operation due to parallel kinematics

In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.

Specifications

Datasheet

Datasheet P-733.2

Version / Date
2023-12-11
pdf - 853 KB
Version / Date
2023-12-11
pdf - 885 KB
Version / Date
2018-06-14
pdf - 728 KB
Version / Date
2018-07-11
pdf - 809 KB

Downloads

Product Note

Product Note

Product Change Notification Piezo Actuator Driven Products

Version / Date
2021-04-19
pdf - 377 KB
English

Datasheet

Datasheet

Datasheet P-733.2

Version / Date
2023-12-11
pdf - 853 KB
Version / Date
2023-12-11
pdf - 885 KB
Version / Date
2018-06-14
pdf - 728 KB
Version / Date
2018-07-11
pdf - 809 KB

Documentation

Documentation

User Manual PZ103

P-733, P-734 Piezo Nanopositioning Systems with Capacitive Sensors

Version / Date
1.1.0 2020-10-26
pdf - 2 MB
Version / Date
1.1.0 2020-10-26
pdf - 2 MB
Documentation

Short Instructions PZ240

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

Version / Date
6.2.0 03/2024
pdf - 561 KB
Version / Date
6.2.0 03/2024
pdf - 595 KB

3-D Models

3-D Models

P-733 3-D model

zip - 2 MB

Brochure

Brochure

Microscope Stage Configurator

Sample Stages and Holders for Inverted Microscopes

Version / Date
BRO70E R3D
pdf - 4 MB
English

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.

Ask an engineer!

Quickly receive an answer to your question by email or phone from a local PI sales engineer.

Compatible Electronics Compatible Accessories Related Products