H-850KHLC Precision Hexapod for High Loads

Vacuum-Compatible, Positioning in 6 Axes with Micrometer Accuracy

H-850KHLC Precision Hexapod for High Loads
Product Description Specifications
  • Vacuum-compatible to 10-6 hPa
  • Six degrees of freedom
  • Load capacity to 1500 kg
  • Travel ranges to 340 mm / 60°
  • Min. incremental motion <1 µm
  • Drive: brushless motors with gearhead
  • Sophisticated controller using vector algorithms

For positioning high loads in six axes of freedom, special requirements have to be fulfilled by the positioning system. The H-850KHLC Hexapod aligns elements in vacuum environments with highest precision, the mechanical coupling is adapted to the vacuum chamber's characteristics.


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