P-911KNMV UHV-Compatible Miniature Piezo Hexapod

High-Precision Positioning Even in Strong Magnetic Fields

PI P-911KNMV
Ultra-compact
UHV-compatible to 10-9 hPa
Nonmagnetic
Ultra-high precision flexure joints
Load capacity to 1.5 kg
Travel ranges to 1.5 mm, to 2°
With NEXLINE® piezo stepping drives

The space-saving parallel-kinematic design allows for the low overall height of less than 90 mm and a diameter of only 100 mm. NEXLINE® piezo stepping motor drives and integrated incremental sensors ensure a position resolution down to 0.1 µm in the linear axes


Customized solution

Travel ranges

Max. load

Sensor resolution

Dimensions

P-911KNMV Miniature Hexapod

X, Y, Z: 1.5 mm

θX, θY, θZ: 2°

1.5 kg

0.1 µm

Ø external: 100 mm

Height: 90 mm

Ordering Information

P-911KNMV
Non-Magnetic, UHV-Compatible Hexapod with NEXLINE® Piezo Stepping Drives, incl. Controller

Downloads

Datasheet

pdf
pdf

PI Datasheet P-911KNMV

UHV-Compatible Miniature Piezo Hexapod High-Precision Positioning Even in Strong Magnetic Fields
pdf - 666 KB
pdf - 665 KB

3D Models

zip

P-911K STEP

All
zip - 124 KB