P-601 PiezoMove Flexure-Guided Linear Actuator

With Optional Position Sensor

PI P-601.1S
Flexure guides for linear motion with minimum tip and tilt
Travel ranges to 400 µm
Resolution to 0.2 nm
Available with integrated position sensor

Precision-class piezo linear actuator

Frictionless flexure-guided design for precision guiding with minimized tip and tilt. Integrated motion amplifier. Medium stiffness

 

PICMA® high-performance piezo drive

Piezoceramic actuators with all-ceramic insulation. Longer lifetime, humidity resistance and operating temperatures to 80 °C

 

Position sensor available for closed-loop operation

Strain gauge sensor made of metal foil: Compact and with a non-linearity to 0.1 % for high position stability and repeatability. Indirect position measurement

 


P-601.1S
P-601.1SL

P-601.3S
P-601.3SL

P-601.4S
P-601.4SL

P-601.x0
P-601.x0L
open-loop versions

Unit

Tolerance

Active axes

Z

Z

Z

Z


Motion and positioning

Integrated sensor

SGS

SGS

SGS

Open-loop travel, -20 to 120 V

100

250

400

as P-601.xS

µm

min. (20 % / -0 %)

Closed-loop travel

100

250

400

µm

calibrated

Open-loop resolution

0.2

0.3

0.4

as P-601.xS

nm

typ.

Closed-loop resolution

2

6

12

nm

typ.

Closed-loop non-linearity

0.1

0.3

0.3

%

typ.

Repeatability

8

10

30

nm

typ.


Mechanical properties

Stiffness in motion direction

0.8

0.38

0.28

as P-601.xS

N/µm

±20 %

Unloaded resonant frequency

750

440

350

as P-601.xS

Hz

±20 %

Resonant frequency @ 30 g

620

350

290

as P-601.xS

Hz

±20 %

Push / pull force capacity in motion direction

30 / 10

20 / 10

15 / 10

as P-601.xS

N

max.

Lateral force

30

30

30

as P-601.xS

N

max.


Drive properties

Ceramic type

PICMA® P-885

PICMA® P-885

PICMA® P-885

as P-601.xS

Electrical capacitance

1.5

3.1

4.6

as P-601.xS

µF

±20 %

Dynamic operating current coefficient

1.9

1.6

1.4

as P-601.xS

µA / (Hz × µm)

±20 %


Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

-20 to 80

°C

Material

Stainless steel

Stainless steel

Stainless steel

Stainless steel

Mass without cables

0.05

0.08

0.11

as P-601.xS

kg

±5 %

Cable length

S versions: 0.3 m

SL versions: 1.5 m

0.3

m

±10 mm

   

Sensor / voltage connection

S versions: Wire leads

SL versions: LEMO

x0 versions: Wire leads x0L versions: LEMO

   

Recommended controller / amplifier

E-610.S0 controller

E-625.SR controller, bench-top device

E-709.SRG controller, bench-top device with digital linearization 

E-610.S0 controller

E-625.SR controller, bench-top device

E-709.SRG controller, bench-top device with digital linearization 

E-610.S0 controller

E-625.SR controller, bench-top device

E-709.SRG controller, bench-top device with digital linearization 

E-610.00 amplifier

E-831 OEM amplifier module

Drawings / Images

PI P-601 Drawing
PI P-601 Drawing
P-601.10
PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, 100 µm, Open-Loop
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P-601.10L
PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, 100 µm, Open-Loop, LEMO Connector(s)
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P-601.1S
PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, 100 µm, SGS Sensor
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P-601.1SL
PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, 100 µm, SGS Sensor, LEMO Connector(s)
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P-601.30
PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, 250 µm, Open-Loop
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P-601.30L
PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, 250 µm, Open-Loop, LEMO Connector(s)
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P-601.3S
PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, 250 µm, SGS Sensor
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P-601.3SL
PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, 250 µm, SGS Sensor, LEMO Connector(s)
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P-601.40
PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, 400 µm, Open-Loop
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P-601.40L
PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, 400 µm, Open-Loop, LEMO Connector(s)
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P-601.4S
PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, 400 µm, SGS Sensor
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P-601.4SL
PiezoMove OEM Flexure-Guided, Lever-Amplified Actuator, 400 µm, SGS Sensor, LEMO Connector(s)
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Downloads

Datasheet

pdf
pdf

PI Datasheet P-601

PiezoMove Flexure-Guided Linear Actuator With Optional Position Sensor
pdf - 785 KB
pdf - 766 KB

Documentation

pdf

Technical Note P601T0001

P-601 PiezoMove Z Actuators
English
pdf - 431 KB

3D Models

zip

P-601 STEP

English
zip - 588 KB