P-620.2 – P-629.2 PIHera XY Piezo Stage

High-Precision XY Nanopositioning Systems with Variable Travel Ranges

Travel ranges 50 to 1800 µm
Resolution to 0.1 nm
Positioning accuracy 0.02 %
Direct metrology with capacitive sensors
X, XY, Z, XYZ versions


P-620.2CD
P-620.2CL

P-621.2CD
P-621.2CL

P-622.2CD
P-622.2CL

P-625.2CD
P-625.2CL

P-628.2CD
P-628.2CL

P-629.2CD
P-629.2CL

Unit

Tolerance

Active axes

X, Y

X, Y

X, Y

X, Y

X, Y

X, Y


Motion and positioning

Integrated sensor

Capacitive

Capacitive

Capacitive

Capacitive

Capacitive

Capacitive

Open-loop travel X, Y, -20 to 120 V

60

120

300

600

950

1800

µm

min. (20% / -0%)

Closed-loop travel in X, Y

50

100

250

500

800

1500

µm

Open-loop resolution in X, Y

0.1

0.2

0.4

0.5

0.5

2

nm

typ.

Closed-loop resolution in X, Y

0.2

0.4

0.7

1.4

3.5

3.5

nm

typ.

Linearity error in X, Y

0.02

0.02

0.02

0.03

0.03*

0.03**

%

typ.

Repeatability X, Y

±2

±2

±2

±5

±10

±14

nm

typ.

Pitch / yaw

±3

±3

±3

±3 / ±5

±20 / ±5

±30 / ±5

µrad

typ.


Mechanical properties

Stiffness X, Y

0.22

0.25

0.2

0.1

0.05

0.1

N/µm

±20 %

Unloaded resonant frequency X

575

420

225

135

75

60

Hz

±20 %

Unloaded resonant frequency Y

800

535

300

195

105

100

Hz

±20 %

Loaded resonant frequency in X, 50 g

270

285

180

120

60

55

Hz

±20 %

Resonant frequency in Y @ 50 g

395

365

215

150

85

85

Hz

±20 %

Resonant frequency in X @ 100 g

285

220

160

105

55

50

Hz

±20 %

Loaded resonant frequency in Y @ 100 g

300

285

175

125

75

80

Hz

±20 %

Push / pull force capacity in motion direction

10 / 5

10 / 8

10 / 8

10 / 8

10 / 8

10 / 8

N

max.

Load capacity

10

10

10

10

10

10

N

max.

Lateral force

10

10

10

10

10

10

N

max.


Drive properties

Piezo ceramic

PICMA® P-883

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-887

PICMA® P-888

Electrical capacitance in X, Y

0.35

1.5

3.1

6.2

19

52

µF

±20 %

Dynamic operating current coefficient in X, Y

0.9

1.9

1.9

1.6

3

4.3

µA / (Hz × µm)

±20 %


Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

°C

Material

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Dimensions

30 mm × 30 mm × 21.5 mm

40 mm × 40 mm × 25 mm

50 mm × 50 mm × 25 mm

60 mm × 60 mm × 25 mm

80 mm × 80 mm × 25 mm

100 mm × 100 mm × 40 mm

Mass

0.195

0.295

0.348

0.43

0.7

1.37

kg

±5 %

Cable length

1.5

1.5

1.5

1.5

1.5

1.5

m

±10 mm

Sensor / voltage connection

CD versions: Sub-D special

CL versions: LEMO

             

Lower axis: X; upper axis: Y.

Versions without sensor are available under the P-62x.20L ordering number; operating temperature range -20 to 150 °C. Sensor / voltage connection LEMO

Vacuum versions to 10-9 hPa are available as P-62x.2UD.

The resolution of PI piezo nanopositioners is not limited by friction or stiction. Value given as noise with .

* With digital controller. With analog controllers 0.05 %

** With digital controller. With analog controllers 0.08 %

Recommended controller / amplifier (CD versions)


, , , , ,

Recommended controller / amplifier (CL versions)


with E-505 amplifier module (1 per axis, high performance) and E-509 controller

Recommended controller / amplifier (0L versions, open-loop)


with E-505 amplifier module (1 per axis, high performance)

--> Zusatz X, Y in der Tabelle bei identischen Daten scheint bissle viel

Drawings / Images

PI P-62x.2 Drawing
P-620.2CD
Precise PIHera XY Nanopositioning System, 50 µm × 50 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s)
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P-620.2CL
Precise PIHera XY Nanopositioning System, 50 µm × 50 µm, Direct Metrology, Capacitive Sensors, LEMO Connector(s)
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P-621.20L
Precise PIHera XY Nanopositioning System, 60 µm × 60 µm, Open-Loop, LEMO Connector(s)
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P-620.2UD
Precise PIHera XY Nanopositioning System, 50 µm × 50 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa
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P-621.2CD
Precise PIHera XY Nanopositioning System, 100 µm × 100 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s)
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P-621.2CL
Precise PIHera XY Nanopositioning System, 100 µm × 100 µm, Direct Metrology, Capacitive Sensors, LEMO Connector(s)
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P-621.20L
Precise PIHera XY Nanopositioning System, 120 µm × 120 µm, Open-Loop, LEMO Connector(s)
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P-621.2UD
Precise PIHera XY Nanopositioning System, 100 µm × 100 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa
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P-622.2CD
Precise PIHera XY Nanopositioning System, 250 µm × 250 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s)
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P-622.2CL
Precise PIHera XY Nanopositioning System, 250 µm × 250 µm, Direct Metrology, Capacitive Sensors, LEMO Connector(s)
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P-622.20L
Precise PIHera XY Nanopositioning System, 300 µm × 300 µm, Open-Loop, LEMO Connector(s)
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P-622.2UD
Precise PIHera XY Nanopositioning System, 250 µm × 250 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa
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P-625.2CD
Precise PIHera XY Nanopositioning System, 500 µm × 500 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s)
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P-625.2CL
Precise PIHera XY Nanopositioning System, 500 µm × 500 µm, Direct Metrology, Capacitive Sensors, LEMO Connector(s)
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P-625.20L
Precise PIHera XY Nanopositioning System, 600 µm × 600 µm, Open-Loop, LEMO Connector(s)
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P-625.2UD
Precise PIHera XY Nanopositioning System, 500 µm × 500 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa
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P-628.2CD
Precise PIHera XY Nanopositioning System, 800 µm × 800 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s)
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P-628.2CL
Precise PIHera XY Nanopositioning System, 800 µm × 800 µm, Direct Metrology, Capacitive Sensors, LEMO Connector(s)
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P-628.20L
Precise PIHera XY Nanopositioning System, 1000 µm × 1000 µm, Open-Loop, LEMO Connector(s)
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P-628.2UD
Precise PIHera XY Nanopositioning System, 800 µm × 800 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa
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P-629.2CD
PIHera XY Piezo Nanopositioning Stage, 1500 µm ×1500 µm, Capacitive Sensors, Sub-D Connector(s)
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P-629.2CL
PIHera XY Piezo Nanopositioning Stage, 1500 µm × 1500 µm, Capacitive Sensors, LEMO Connector(s)
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P-629.20L
Precise PIHera XY Nanopositioning System, 1800 µm × 1800 µm, Open-Loop, LEMO Connector(s)
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P-629.2UD
PIHera XY Piezo Nanopositioning Stage, 1500 µm ×1500 µm, Capacitive Sensors, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa
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Downloads

Datasheet

pdf
pdf

PI Datasheet P-620.2 – P-629.2

PIHera XY Piezo Stage High-Precision XY Nanopositioning Systems with Variable Travel Ranges
pdf - 904 KB
pdf - 872 KB

Documentation

pdf

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
3.0.0
All
pdf - 603 KB
pdf
pdf

User Manual PZ234

P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors
1.0.0
pdf - 1,015 KB
pdf - 1 MB

3D Models

zip

P-62x.2 STEP

All
zip - 1,011 KB

Software Files

zip

PI Press Release P-620 PIHera

All
zip - 991 KB