V-738 High-Precision XY Stage
Clear Aperture, High Travel Accuracy and Stability, Linear Motors
- Travel range 102 mm × 102 mm (4")
- Large aperture, 150 mm × 150 mm
- Unidirectional repeatability to 0.1 µm
- Velocity to 500 mm/s
- 3-phase linear motor
- High-resolution incremental linear encoder
Linear motors
Linear motors are electromagnetic direct drives. They dispense with mechanical components in the drivetrain and transfer the drive force directly and friction-free to the motion platform. The drives reach high velocities and accelerations. Ironless motors are particularly suitable for positioning tasks with the highest demands on precision because there is no undesirable interaction with the permanent magnets. This allows smooth running even at the lowest velocities and at the same time, there is no vibration at high velocities. Nonlinearity in control behavior is avoided and any position can be controlled easily. The drive force can be set freely.
Recirculating ball bearings
When carefully assembled, recirculating ball bearings are distinguished by a beneficial combination of high load capacity, lifetime, maintenance-free operation, and guiding accuracy. The moving part of the stages is supported by four preloaded linear ball bearing units which run on two guide rails. Each bearing unit is made up of two independent rows of circulating ball bearings.
Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Other travel ranges on request.
Application fields
Medical industry. Laser cutting. Scanning. Biotechnology. Metrology. AOI (Automatic Optical Inspection). Microscopy.
Specifications
Specifications
Motion and positioning | V-738.056111 | Unit | Tolerance |
---|---|---|---|
Travel range | 102 x 102 | mm | |
Integrated sensor | Incremental linear encoder | ||
Design resolution | 0.001 | µm | |
Sensor signal | Sin/cos, 1 V peak-peak, 20 µm signal period | ||
Minimum incremental motion | 0.02 | µm | Typ. |
Unidirectional repeatability | 0.1 | µm | Typ. |
Bidirectional repeatability | ±0.25 | µm | Typ. |
Angular error xry (pitch) | ±40 | µrad | Typ. |
Angular error xrz (yaw) | ±20 | µrad | Typ. |
Angular error yrx (pitch) | ±40 | µrad | Typ. |
Angular error yrz (yaw) | ±20 | µrad | Typ. |
Straightness / flatness | ±2 | µm | Typ. |
Orthogonality | ±96.963 | µrad | Typ. |
Velocity | 500 | mm/s | Max. |
Acceleration in X, Y, without load | 10 | m/s² | Max. |
Reference and limit switches | Forked photoelectric sensor, N/C contact, 5V, NPN |
Drive properties | V-738.056111 | Unit | Tolerance |
---|---|---|---|
Motor type | Ironless 3-phase linear motor | ||
Operating voltage, nominal | 48 | V | Nom. |
Operating voltage, max. | 48 | V | Max. |
Peak force | 200 | N | Max. |
Nominal force | 87 | N | Typ. |
Peak current, RMS | 15 | a | Typ. |
Nominal current, RMS | 4.4 | a | Typ. |
Force constant, RMS | N/A | Typ. | |
Motor constant | 71 | N/√W | Typ. |
Electrical time constant | 0.4 | ms | |
Resistance phase-phase | 3.6 | Ω | Typ. |
Inductance phase-phase | 1.2 | mH | Typ. |
Back EMF phase-phase | 16 | Vs/m | Max. |
Pole pitch N-N | 30 | mm |
Miscellaneous | V-738.056111 | Unit | Tolerance |
---|---|---|---|
Operating temperature range | 5 to 40 | °C | |
Material | Aluminum, black anodized | ||
Moved mass in X, unloaded | 16.8 | kg | ±5 % |
Moved mass in Y, unloaded | 8 | kg | ±5 % |
Overall mass | 24 | kg | ±5 % |
Connector | 2 × HD D-sub 26 (m) (motor) 2 × D-sub 15 (f) (sensor) | ||
Recommended controller | G-901.R319 SMC Hydra (double axis) C-891 (single axis) C-885 with C-891.11C885 (up to 20 axes) ACS modular controller |
Downloads
Datasheet
Documentation
User Manual MP183
L-738 / V-738 Precision XY Stage
3-D Models
3-D model V-738
Quote / Order
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