V-738 High-Precision XY Stage

V-738 High-Precision XY Stage

Clear Aperture, High Travel Accuracy and Stability, Linear Motors

Travel range 102 mm × 102 mm (4")
Large aperture, 150 mm × 150 mm
Unidirectional repeatability to 0.1 µm
Velocity to 500 mm/s
3-phase linear motor
High-resolution incremental linear encoder

V-738, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Linear motors

Linear motors are electromagnetic direct drives. They dispense with mechanical components in the drivetrain and transfer the drive force directly and friction-free to the motion platform. The drives reach high velocities and accelerations. Ironless motors are particularly suitable for positioning tasks with the highest demands on precision because there is no undesirable interaction with the permanent magnets. This allows smooth running even at the lowest velocities and at the same time, there is no vibration at high velocities. Nonlinearity in control behavior is avoided and any position can be controlled easily. The drive force can be set freely.

Recirculating ball bearings

When carefully assembled, recirculating ball bearings are distinguished by a beneficial combination of high load capacity, lifetime, maintenance-free operation, and guiding accuracy. The moving part of the stages is supported by four preloaded recirculating ball bearing units, which run on two guide rails. Each bearing unit is made up of two independent rows of circulating ball bearings.

Highly accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Other travel ranges on request.

Application fields

Medical industry. Laser cutting. Scanning. Biotechnology. Measuring technology. AOI (Automatic Optical Inspection). Microscopy.

Download datasheet specifications quote / order

Datasheet

Version / Date

2024-02-14

pdf - 1 MB

Version / Date

2024-02-14

pdf - 1 MB

Version / Date

2019-08-02

pdf - 819 KB

Select a travel range:

Motion	V-738.056111	Tolerance
Active axes	X	Y
Travel range in X	102 mm
Travel range in Y	102 mm
Acceleration in X, unloaded	10 m/s²	max.
Acceleration in Y, unloaded	10 m/s²	max.
Maximum velocity in X, unloaded	500 mm/s
Maximum velocity in Y, unloaded	500 mm/s
Orthogonality	± 96.96 µrad	typ.
Straightness (Linear crosstalk in X with motion in Y)	± 2 µm	typ.
Straightness (Linear crosstalk in Y with motion in X)	± 2 µm	typ.
Flatness (Linear crosstalk in Z with motion in X)	± 2 µm	typ.
Flatness (Linear crosstalk in Z with motion in Y)	± 2 µm	typ.
Pitch (Rotational crosstalk in θX with motion in Y)	± 40 µrad	typ.
Pitch (Rotational crosstalk in θY with motion in X)	± 40 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in X)	± 20 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in Y)	± 20 µrad	typ.
Positioning	V-738.056111	Tolerance
Minimum incremental motion in X	0.02 µm	typ.
Minimum incremental motion in Y	0.02 µm	typ.
Unidirectional repeatability in X	± 0.05 µm	typ.
Unidirectional repeatability in Y	± 0.05 µm	typ.
Bidirectional repeatability in X	0.5 µm	typ.
Bidirectional repeatability in Y	0.5 µm	typ.
Reference switch	Forked photoelectric sensor, N/C contact, 5 V, NPN
Limit switches	Forked photoelectric sensor, N/C contact, 5 V, NPN
Integrated sensor	Incremental linear encoder
Sensor signal	Sin/cos, 1 V peak-peak
Sensor signal period	20 µm
System resolution in X	1 nm
System resolution in Y	1 nm
Drive Properties	V-738.056111	Tolerance
Drive type	Ironless 3-phase linear motor
Operating voltage	48 V
Nominal current, RMS	4.4 A	typ.
Peak current, RMS	15 A	typ.
Drive force in X	87 N	typ.
Antriebskraft in X	87 N	typ.
Peak force in X	200 N
Peak force in Y	200 N
Motor constant	71 N/√W	typ.
Time constant	0.4 ms
Resistance phase-phase	3.6 Ω	typ.
Inductance phase-phase	1.2 mH
Back EMF phase-phase	16 V·s/m	max.
Pole pitch N-N	30 mm
Mechanical Properties	V-738.056111	Tolerance
Permissible push force in Z	100 N	max.
Permissible torque in θX	130 N·m	max.
Permissible torque in θY	130 N·m	max.
Permissible torque in θZ	90 N·m	max.
Moved mass in X, unloaded	16800 g
Moved mass in Y, unloaded	8000 g
Guide	Recirculating ball bearing guide
Overall mass	24000 g
Material	Aluminum, black anodized
Miscellaneous	V-738.056111	Tolerance
Operating temperature range	5 to 40 °C
Connector	2 × HD D-sub 26 (m)
Sensor connector	2 × D-sub 15 (f)
Recommended controllers / drivers	G-901.R319 C-891.130300 C-885 with C-891.11C885 ACS modular controller

Download datasheet downloads quote / order

Datasheet

Version / Date

2024-02-14

pdf - 1 MB

Version / Date

2024-02-14

pdf - 1 MB

Version / Date

2019-08-02

pdf - 819 KB

Documentation

Positioners with Magnetic Linear Motor: V-308 / V-408 / V-508 / V-52x / V-551 / V-610 / V-73x / V-741

Version / Date

4.1.0 06/2023

pdf - 419 KB

Version / Date

4.1.0 06/2023

pdf - 419 KB

Documentation

L-738 / V-738 Precision XY Stage

Version / Date

1.2.0 2024-01-18

pdf - 1 MB

Version / Date

1.2.0 2024-01-18

pdf - 1 MB

3D Models

zip - 2 MB

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.

V-738.056111

High-precision XY stage, ironless 3-phase linear motor; 102 mm x 102 mm travel range (X × Y); 100 N load capacity; 500 mm/s × 500 mm/s maximum velocity; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak

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