P-561 • P-562 • P-563 PIMars Nanopositioning Stage

High-Precision Nanopositioning System for up to 3 Axes

Parallel kinematics / metrology for enhanced responsiveness and multi-axis precision
Travel ranges to 300 x 300 x 300 µm
Highest linearity and stability with capacitive sensors
Frictionless, high-precision flexure guiding system
Excellent scanning flatness
High-dynamics XYZ version available
Clear aperture 66 mm x 66 mm
Outstanding lifetime due to PICMA® piezo actuators
UHV versions to 10-9 hPa

Specifications

Datasheet P-561 • P-562 • P-563

Version / Date
2017-05-08
Version / Date
2017-05-08
Document language
pdf - 1,014 KB
pdf - 1,017 KB

Drawings / Images

P-561.3DD Drawing
P-562.3CD (unloaded) step and settle is faster than 10 ms in X, Y and Z
PI P-562.6CD Drawing

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Downloads

Datasheet

Datasheet P-561 • P-562 • P-563

Version / Date
2017-05-08
Version / Date
2017-05-08
Document language
pdf - 1,014 KB
pdf - 1,017 KB

Documentation

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
Version / Date
4.0.0 2017-02-06
pdf - 635 KB

User Manual PZ248

P-561, P-562, P-563 PIMars XYZ Nanopositioning Systems
Version / Date
2013-11-22
Version / Date
2013-11-22
Document language
pdf - 947 KB
pdf - 972 KB

3-D Models

P-56x STEP

zip - 3 MB