Capacitance Nanosensors
Multi-Axis Measurements For closed-loop, multi-axis nanopositioning tasks, high-performance stages with capacitive sensors combine direct metrology and paralles kinematics. When used in multi-axis nano [...] of a thin metal or semiconductor foil (piezo resistant), which is attached to the piezo ceramics or, for improved precision, to the guiding system of a flexure stage. This type of position measurement is [...] Ɛr the dielectric constant of the material between the capacitor plates, generally air 0.3 nm increments of a piezo nanopositioning system. The capacitive sensor (bottom) shows a considerably higher resolution