E-509.E PISeca Sensor Evaluation / Controller
Servo Controller Module for Three Axes, E-500 Piezo Controller System
- E-509.E03: Electronics module, 3 axes, for capacitive sensors
- E-509.E3: Sensor module, 3 axes, with additional servo controller for piezo systems
- Plug-in modules for E-500 / E-501 chassis
- ILS circuitry optimizes capacitive sensor linearity
- Optional measurement ranges
- Variable bandwidth (optional)
Signal evaluation and servo controller module for PISeca
The E-509.E03 and E-509.E3 are available as plug-in modules for the E-500 / E-501 chassis for high-resolution capacitive single-plate sensors in the PISeca series:
- E-509.E03 for signal evaluation
- E-509.E3 as servo controller module
Specifications
Specifications
Sensor | E-509.E03 | E-509.E3 |
---|---|---|
Controller type | – | Analog P-I and notch filter |
Sensor type | PISeca single electrode, capacitive | PISeca single electrode, capacitive |
Sensor channels | 3 | 3 |
Sensor bandwidth | 0.3 to 10 kHz (adjustable) | 0.3 to 10 kHz (adjustable) |
Extension factor for measurement range 1 | 1 (default), 2 / 2.5 / 5 (optional) | 1 (default), 2 / 2.5 / 5 (optional) |
Noise factor | 0.14 ppm/√Hz 2 | 0.14 ppm/√Hz 2 |
External synchronization | 3 synchronized channels | 3 synchronized channels |
Thermal drift | <1 mV/°C | <1 mV/°C |
Static resolution 3 | <0.001 % of the measurement range (RMS) | <0.001 % of the measurement range (RMS) |
Dynamic resolution 3 | <0.002 % of the measurement range (RMS) | <0.002 % of the measurement range (RMS) |
Linearity error in the nominal measurement range | <0.1 % (<0.2 % for D-510.020) | <0.1 % |
Downloads
Datasheet
Documentation
User Manual PZ77
E-509 Sensor / Piezo Servo-Control Module
User Manual PZ62
E-500 / E-501 Series Modular Piezo Controller: Chassis with power supply, amplifier modules (E-503, E-504, E-505, E-506, E-508), sensor and servo-control module (E-509), display and interface modules (E-515, E-517).
Quote / Order
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