M-664 Precision Stage with Linear Piezo Drive

Fast, Self-Locking, Low Profile

Travel range 25 mm
Only 15 mm profile height
Linear encoder with 100 nm resolution
Max. velocity 400 mm/s
Self-locking at rest, keine Wärmeentwicklung, no servo jitter

Precision-class micro translation stage

Integrierter Piezokeramischer Direktantrieb. Compact XY combinations available

 

PILine® piezo ultrasonic drive

Self-locking, with no heat generation at rest. Excellent start / stop dynamics. Crossed roller bearings. Noncontact limit and reference point switches

 

Direct-metrology linear encoder

High accuracy and repeatability

 

Fields of application

Industry and research. For Mikromanipulation, Qualitätssicherung, Biotechnologie

 

Valid patents

US patent no. 6,765,335B2 European patent no. 1267425B1

 

Zubehör

M-664.AP1 Adapter Plate for XY Mounting of M-664, 4 mm high

 

M-664.164 Tolerance

Active axes

X


Motion and positioning

Travel range

25 mm

Integrated sensor

Linear encoder

Sensor resolution

0.1 µm

Min. incremental motion

0.6 µm

typ.

Bidirectional repeatability

±1 µm

typ.

Unidirectional repeatability

±0.2 µm

typ.

Pitch

±75 µrad

typ.

Yaw

±50 µrad

typ.

Velocity

400 mm/s

max.

Reference point switch repeatability

1 µm

typ.


Mechanical properties

Load capacity

25 N

max.

Push / pull force

2.5 N

max.

Holding force

2.5 N

max.


Drive properties

Motor type

P-664 PILine® Ultrasonic Piezo Drive

Limit and reference point switches

Hall-effect


Miscellaneous

Operating temperature range

0 to 50 °C

Material

Al (black anodized)

Dimensions

90 mm x 60 mm x 15 mm

Mass

0.225 kg

±5 %

Cable length

1.5 m

±10 mm

Connector

MDR, 14-pin

Recommended controller / driver

C-867 controller / driver

Ask about custom designs!

Drawings / Images

M-664, dimensions in mm
The smallest closed-loop linear stages with self-locking PILine® drive: M-664 (right) and M-663 (left)

Downloads

Datasheet

pdf
pdf

PI Datasheet M-664

Precision Stage with Linear Piezo Drive Fast, Self-Locking, Low Profile
pdf - 781 KB
pdf - 777 KB

Documentation

pdf

Short Instructions MP121EK

M-66x, M-68x, U-521, U-62x, U-651 PILine® Stages
3.0.0
All
pdf - 885 KB
pdf
pdf

User Manual MP96

M-664 PILine® Micro Positioning Stage
pdf - 796 KB
pdf - 1 MB

3D Models

zip

M-664 STEP

All
zip - 40 KB