P-630 High-Dynamics Nanopositioning System

1 Axis with Large Clear Aperture

PI P-630
Resonant frequency to 3.25 kHz
Travel ranges to 80 µm
Small footprint and low-profile height
Clear aperture with 30 mm diameter

Reference-class nanopositioning system

1 axis. Frictionless flexure-guided design, directly driven. Capacitive position sensor for maximum stability and linearity

PICMA® high-performance piezo drive

Piezoceramic actuators with all-ceramic insulation. Longer lifetime, humidity resistance and operating temperatures to 80 °C

Fields of application

Precision positioning of optical elements or objects in the optical path, for micromachining, microstructuring and scanning tasks in research and industry. Available as vacuum option


P-630.XCD

P-631.XCD

Unit

Active axes

X

X


Motion and positioning

Integrated sensor

Capacitive

Capacitive

Open-loop travel, -20 to 120 V

45

90

µm

Closed-loop travel

40

80

µm

Open-loop resolution

0.1

0.1

nm

Closed-loop resolution

0.2

0.2

nm

Closed-loop nonlinearity

0.02

0.02

%

Repeatability over the entire travel range

±2

±3

nm

Pitch / yaw

±5

±5

µrad

Straightness / flatness

50

50

nm


Mechanical properties

Stiffness in motion direction

5.5

5

N / µm

Unloaded resonant frequency

3250

2850

Hz

Resonant frequency @ 60 g

1600

1200

Hz

Push / pull force capacity in motion direction

10

10

N

Load capacity

10

10

N


Drive properties

Piezo ceramic

PICMA® P-887

PICMA® P-885; P-887

Electrical capacitance

6.4

12.6

µF

Dynamic operating current coefficient

20

20

µA / Hz × µm


Miscellaneous

Operating temperature range

0 to 40

0 to 40

°C

Material

Aluminum

Aluminum

Dimensions

102 mm × 50 mm × 18 mm

102 mm × 50 mm × 18 mm

Mass

300

320

g

Cable length

1.5

1.5

m

Sensor / voltage connection

Sub-D special connector (single-axis, capacitive)

Sub-D special connector (single-axis, capacitive)

Recommended controller / amplifier

E-709.CRcost-efficient digital controller

E-709.CHG digital controller for high dynamics and quick step-and-settle

E-753.1CDdigital controller for high resolution and linearity

E-709.CRcost-efficient digital controller

E-709.CHG digital controller for high dynamics and quick step-and-settle

E-753.1CDdigital controller for high resolution and linearity

Drawings / Images

PI P-630 Drawing
PI P-630 Diagram, The smallest resolvable step size of P-630.XCD with E-753.1CD digital controller is below one nm. Measured externally with a laser interferometer.

Downloads

Datasheet

pdf
pdf

PI Datasheet P-630

High-Dynamics Nanopositioning System 1 Axis with Large Clear Aperture
pdf - 866 KB
pdf - 864 KB

Documentation

pdf

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
3.0.0
All
pdf - 984 KB
pdf
pdf

User Manual PZ247

P-630, P-631 Piezo Nanopositioning Systems with Aperture and Capacitive Sensor
1.0.0
pdf - 656 KB
pdf - 683 KB

Others

pdf
pdf

TOPICS – the PI Magazine, Issue 49

Hexapod Automation Field Bus / G-Code; Magnetic Direct Drives PIMag Voice Coil and more ...
NUZ49
pdf - 2 MB
pdf - 885 KB