L-738 Precision XY Stage

Clear Aperture, High Travel Accuracy, and Stability

L-738 Precision XY Stage

Product Description Specifications Downloads Quote / Order

Travel range 102 mm × 102 mm (4")
Large aperture, 150 mm × 150 mm
Unidirectional repeatability to 0.05 µm
Velocity to 90 mm/s
2-phase stepper motors, DC–motors
Incremental linear encoder with 1 nm resolution

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Optical reference points and limit switches.

When carefully assembled, recirculating ball bearings are distinguished by a beneficial combination of high load capacity, lifetime, maintenance-free operation, and guiding accuracy. The moving part of the stages is supported by four preloaded linear ball bearing units which run on two guide rails. Each bearing unit is made up of two independent rows of circulating ball bearings.

2-phase stepper motor for high torque even at low velocities and higher resolution
DC motor for high velocity constancy, low vibration, and high velocities

Medical industry, Laser cutting, Biotechnology, Metrology, Microscopy

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Datasheet

Datasheet L-738

Version / Date

2019-05-29

Version / Date

2019-05-29

Version / Date

2018-10-23

Version / Date

2019-01-08

Document language

pdf - 725 KB

pdf - 733 KB

pdf - 799 KB

pdf - 770 KB

Stages with DC motor

Motion	L-738.053111 / L-738.053112 / L-738.053132	Unit	Tolerance
Active axes	X, Y
Travel range	102 × 102	mm
Angular error xry (pitch)	±40	µrad	typ.
Angular error xrz (yaw)	±20	µrad	typ.
Angular error yrx (pitch)	±40	µrad	typ.
Angular error yrz (yaw)	±20	µrad	typ.
Straightness / flatness	±2	µm	typ.
Orthogonality	±96.963	µrad	typ.
Velocity	L-738.053111 / L-738.053112: 50 L-738.053132: 90	mm/s	max.

Positioning	L-738.053111	L-738.053112	L-738.053132	Unit	Tolerance
Integrated sensor	Incremental linear encoder	Incremental linear encoder	Incremental rotary encoder
Sensor signal	Sin/cos, 1 V peak-peak, 20 µm signal period	A/B quadrature, TTL	A/B quadrature, TTL
Design resolution	0.001	0.01	0.1	µm
Sensor resolution rotary encoder	–	–	20000	Cts./rev.
Minimum incremental motion	0.1	0.1	0.4	µm	typ.
Unidirectional repeatability	0.1	0.1	0.4	µm	typ.
Bidirectional repeatability	±0.5	±0.5	±2	µm	typ.
Reference point switch repeatability	<1	<1	<1	µm	typ.
Reference and limit switches	Optical	Optical	Optical

Mechanical properties	L-738.053xxx	Unit	Tolerance
Drive screw type	Ball screw
Drive screw pitch	2	mm
Guide type	Recirculating ball bearing guide
Holding force, power off	20	N	typ.
Push/pull force F_x, F_y power on	100	N	max.
Load capacity	200	N	max.
Permissible torque Mx in θ_X	130	N·m	max.
Permissible torque My in θ_Y	130	N·m	max.
Permissible torque Mz in θ_Z	90	N·m	max.

Drive properties	L-738.053xxx	Unit	Tolerance
Motor type	DC motor
Operating voltage, nominal	24	V	nom.
Operating voltage, max.	48	V	max.

Miscellaneous	L-738.053111	L-738.053112	L-738.053132	Unit	Tolerance
Operating temperature range	5 to 40	5 to 40	5 to 40	°C
Material	Aluminum, black anodized	Aluminum, black anodized	Aluminum, black anodized
Mass	24	24	24	kg	±5 %
Moved mass in X, unloaded	14.6	14.6	14.6	kg	±5 %
Moved mass in Y, unloaded	5.8	5.8	5.8	kg	±5 %
Connector	2 × HD Sub-D 26 (m) (motor) 2 × Sub-D 15 (f) (sensor)	2 × HD Sub-D 26 (m) (motor/sensor)	2 × HD Sub-D 26 (m) (motor/sensor)
Recommended controllers/drivers	SMC Hydra (double axis) C-891 (single axis) C-885 with C-891.11C885 (up to 20 axes) ACS modular controller	C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller	C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller

Stages with stepper motor

Motion	L-738.051100 / L-738.051111 / L-738.051112	Unit	Tolerance
Active axes	X, Y
Travel range	102 × 102	mm
Angular error xry (pitch)	±40	µrad	typ.
Angular error xrz (yaw)	±20	µrad	typ.
Angular error yrx (pitch)	±40	µrad	typ.
Angular error yrz (yaw)	±20	µrad	typ.
Straightness / flatness	±2	µm	typ.
Orthogonality	±96.963	µrad	typ.
Velocity	35	mm/s	max.

Positioning	L-738.051100	L-738.051111	L-738.051112	Unit	Tolerance
Integrated sensor	–	Incremental linear encoder	Incremental linear encoder
Sensor signal	–	Sin/cos, 1 V peak-peak, 20 µm signal period	A/B quadrature, TTL
Design resolution	10.0	0.001	0.01	µm
Minimum incremental motion	0.2	0.05	0.05	µm	typ.
Unidirectional repeatability	0.2	0.05	0.05	µm	typ.
Bidirectional repeatability	±2	±0.5	±0.5	µm	typ.
Reference point switch repeatability	<1	<1	<1	µm	typ.
Reference and limit switches	Optical	Optical	Optical

Mechanical properties	L-738.051xxx	Unit	Tolerance
Drive screw type	Ball screw
Drive screw pitch	2	mm
Guide type	Recirculating ball bearing guide
Holding force, power off	60	N	typ.
Push/pull force F_X, F_Y power on	100	N	max.
Load capacity	200	N	max.
Permissible torque Mx in θ_X	130	N·m	max.
Permissible torque My in θ_Y	130	N·m	max.
Permissible torque Mz in θ_Z	90	N·m	max.

Drive properties	L-738.051xxx	Unit	Tolerance
Motor type	Stepper motor, 2-phase
Operating voltage, nominal	24	V	nom.
Operating voltage, max.	48	V	max.
Step resolution	200	Full steps/rev.

Miscellaneous	L-738.051100	L-738.051111	L-738.051112	Unit	Tolerance
Operating temperature range	5 to 40	5 to 40	5 to 40	°C
Material	Aluminum, black anodized	Aluminum, black anodized	Aluminum, black anodized
Mass	22	22	22	kg	±5 %
Moved mass in X, unloaded	13.8	13.8	13.8	kg	±5 %
Moved mass in Y, unloaded	5.8	5.8	5.8	kg	±5 %
Connector	2 × HD Sub-D 26 (m) (motor)	2 × HD Sub-D 26 (m) (motor) 2 × Sub-D 15 (f) (sensor)	2 × HD Sub-D 26 (m) (motor/sensor)
Recommended controllers/drivers	C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller	SMC Hydra (double axis) ACS modular controller	C-663.12 (single axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller

All cables required for operation with the recommended controller are included in the scope of delivery. The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.

Download datasheet Go to download

Datasheet

Datasheet L-738

Version / Date

2019-05-29

Version / Date

2019-05-29

Version / Date

2018-10-23

Version / Date

2019-01-08

Document language

pdf - 725 KB

pdf - 733 KB

pdf - 799 KB

pdf - 770 KB

Documentation

Short Instructions MP146EK

Stages with Electric Motors: DT-xx / ES-100 / HPS-170 / L-xxx / LS-xx / LS-xxx / MTS-65 / NPE-200 / PLS-85 / PRS-xxx / RS-40 / UPL-120 / UPM-160 / VT-80

Version / Date

1.5.0 October 2017

Download

pdf - 395 KB

Documentation

User Manual MP183

L-738 / V-738 Precision XY Stage

Version / Date

1.1.1 2019-05-29

Version / Date

1.1.1 2019-05-29

Document language

Download

pdf - 1 MB

Download

pdf - 1 MB

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Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

L-738.051100

Precision XY stage, 380 mm × 380 mm width, 102 × 102 mm travel range, 150 × 150 mm clear aperture, stepper motor , including 3 m cable set

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L-738.051111

Precision XY stage, 380 mm × 380 mm width, 102 × 102 mm travel range, 150 × 150 mm clear aperture, stepper motor, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period , including 3 m cable set

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L-738.051112

Precision XY stage, 380 mm × 380 mm width, 102 × 102 mm travel range, 150 × 150 mm clear aperture, stepper motor, incremental linear encoder with A/B quadrature signal transmission, 10 nm sensor resolution , including 3 m cable set

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L-738.053111

Precision XY stage, 380 mm × 380 mm width, 102 × 102 mm travel range, 150 × 150 mm clear aperture, DC motor, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period , including 3 m cable set

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L-738.053112

Precision XY stage, 380 mm × 380 mm width, 102 × 102 mm travel range, 150 × 150 mm clear aperture, DC motor, incremental linear encoder with A/B quadrature signal transmission, 10 nm sensor resolution , including 3 m cable set

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L-738.053132

Precision XY stage, 380 mm × 380 mm width, 102 × 102 mm travel range, 150 × 150 mm clear aperture, DC motor, rotary encoder , including 3 m cable set

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