L-738.051100
Precision XY stage, 380 mm × 380 mm width, 102 × 102 mm travel range, 150 × 150 mm clear aperture, stepper motor
L-738 Precision XY Stage
Clear Aperture, High Travel Accuracy, and Stability
- Travel range 102 mm × 102 mm (4")
- Large aperture, 150 mm × 150 mm
- Unidirectional repeatability to 0.05 µm
- Velocity to 90 mm/s
- 2-phase stepper motors, DC‑motors
- Incremental linear encoder with 1 nm resolution
L-738.053132
L-738, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.
L-738 Precision XY Stage
Product Description
Specifications
Downloads
Quote / Order
Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Optical reference and limit switches.
Recirculating ball bearings
When carefully assembled, recirculating ball bearings are distinguished by a beneficial combination of high load capacity, lifetime, maintenance-free operation, and guiding accuracy. The moving part of the stages is supported by four preloaded linear ball bearing units which run on two guide rails. Each bearing unit is made up of two independent rows of circulating ball bearings.
Drive types
- 2-phase stepper motor for high torque even at low velocities and higher resolution
- DC motor for high velocity constancy, low vibration, and high velocities
Application fields
Medical industry. Laser cutting. Biotechnology. Metrology. Microscopy.
Specifications
Specifications
Motion | L-738.053111 / L-738.053112 / L-738.053132 | Unit | Tolerance |
|---|---|---|---|
Active axes | X, Y | ||
Travel range | 102 × 102 | mm | |
Angular error xry (pitch) | ±40 | µrad | Typ. |
Angular error xrz (yaw) | ±20 | µrad | Typ. |
Angular error yrx (pitch) | ±40 | µrad | Typ. |
Angular error yrz (yaw) | ±20 | µrad | Typ. |
Straightness / flatness | ±2 | µm | Typ. |
Orthogonality | ±96.963 | µrad | Typ. |
Velocity | L-738.053111 / L-738.053112: 50 L-738.053132: 90 | mm/s | Max. |
Positioning | L-738.053111 | L-738.053112 | L-738.053132 | Unit | Tolerance |
|---|---|---|---|---|---|
Integrated sensor | Incremental linear encoder | Incremental linear encoder | Incremental rotary encoder | ||
Sensor signal | Sin/cos, 1 V peak-peak, 20 µm signal period | A/B quadrature, TTL | A/B quadrature, TTL | ||
Design resolution | 0.001 | 0.01 | 0.1 | µm | |
Sensor resolution rotary encoder | – | – | 20000 | Cts./rev. | |
Minimum incremental motion | 0.1 | 0.1 | 0.4 | µm | Typ. |
Unidirectional repeatability | 0.1 | 0.1 | 0.4 | µm | Typ. |
Bidirectional repeatability | ±0.5 | ±0.5 | ±2 | µm | Typ. |
Reference switch repeatability | <1 | <1 | <1 | µm | Typ. |
Reference and limit switches | Forked photoelectric sensor, N/C contact, 5V, NPN | Forked photoelectric sensor, N/C contact, 5V, NPN | Forked photoelectric sensor, N/C contact, 5V, NPN |
Mechanical properties | L-738.053xxx | Unit | Tolerance |
|---|---|---|---|
Drive screw type | Ball screw | ||
Drive screw pitch | 2 | mm | |
Guide type | Recirculating ball bearing guide | ||
Holding force, power off | 20 | N | Typ. |
Push/pull force Fx, Fy power on | 100 | N | Max. |
Load Capacity | 200 | N | Max. |
Permissible torque Mx in θX | 130 | N·m | Max. |
Permissible torque My in θY | 130 | N·m | Max. |
Permissible torque Mz in θZ | 90 | N·m | Max. |
Miscellaneous | L-738.053111 | L-738.053112 | L-738.053132 | Unit | Tolerance |
|---|---|---|---|---|---|
Operating temperature range | 5 to 40 | 5 to 40 | 5 to 40 | °C | |
Material | Aluminum, black anodized | Aluminum, black anodized | Aluminum, black anodized | ||
Mass | 24 | 24 | 24 | kg | ±5 % |
Moved mass in X, unloaded | 14.6 | 14.6 | 14.6 | kg | ±5 % |
Moved mass in Y, unloaded | 5.8 | 5.8 | 5.8 | kg | ±5 % |
Connector | 2 × HD D-sub 26 (m) (motor) 2 × D-sub 15 (f) (sensor) | 2 × HD D-sub 26 (m) (motor/sensor) | 2 × HD D-sub 26 (m) (motor/sensor) | ||
Recommended controllers / drivers | G-901.R319 SMC Hydra (double axis) C-891 (single axis) C-885 with C-891.11C885 (up to 20 axes) ACS modular controller | G-901.R319 C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller | G-901.R319 C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller |
Motion | L-738.051100 / L-738.051111 / L-738.051112 | Unit | Tolerance |
|---|---|---|---|
Active axes | X, Y | ||
Travel range | 102 × 102 | mm | |
Angular error xry (pitch) | ±40 | µrad | Typ. |
Angular error xrz (yaw) | ±20 | µrad | Typ. |
Angular error yrx (pitch) | ±40 | µrad | Typ. |
Angular error yrz (yaw) | ±20 | µrad | Typ. |
Straightness / flatness | ±2 | µm | Typ. |
Orthogonality | ±96.963 | µrad | Typ. |
Velocity | 35 | mm/s | Max. |
Positioning | L-738.051100 | L-738.051111 | L-738.051112 | Unit | Tolerance |
|---|---|---|---|---|---|
Integrated sensor | – | Incremental linear encoder | Incremental linear encoder | ||
Sensor signal | – | Sin/cos, 1 V peak-peak, 20 µm signal period | A/B quadrature, TTL | ||
Design resolution | 10.0 | 0.001 | 0.01 | µm | |
Minimum incremental motion | 0.2 | 0.05 | 0.05 | µm | Typ. |
Unidirectional repeatability | 0.2 | 0.05 | 0.05 | µm | Typ. |
Bidirectional repeatability | ±2 | ±0.5 | ±0.5 | µm | Typ. |
Reference switch repeatability | <1 | <1 | <1 | µm | Typ. |
Reference and limit switches | Forked photoelectric sensor, N/C contact, 5V, NPN | Forked photoelectric sensor, N/C contact, 5V, NPN | Forked photoelectric sensor, N/C contact, 5V, NPN |
Mechanical properties | L-738.051xxx | Unit | Tolerance |
|---|---|---|---|
Drive screw type | Ball screw | ||
Drive screw pitch | 2 | mm | |
Guide type | Recirculating ball bearing guide | ||
Holding force, power off | 60 | N | Typ. |
Push/pull force FX, FY power on | 100 | N | Max. |
Load Capacity | 200 | N | Max. |
Permissible torque Mx in θX | 130 | N·m | Max. |
Permissible torque My in θY | 130 | N·m | Max. |
Permissible torque Mz in θZ | 90 | N·m | Max. |
Miscellaneous | L-738.051100 | L-738.051111 | L-738.051112 | Unit | Tolerance |
|---|---|---|---|---|---|
Operating temperature range | 5 to 40 | 5 to 40 | 5 to 40 | °C | |
Material | Aluminum, black anodized | Aluminum, black anodized | Aluminum, black anodized | ||
Mass | 22 | 22 | 22 | kg | ±5 % |
Moved mass in X, unloaded | 13.8 | 13.8 | 13.8 | kg | ±5 % |
Moved mass in Y, unloaded | 5.8 | 5.8 | 5.8 | kg | ±5 % |
Connector | 2 × HD D-sub 26 (m) (motor) | 2 × HD D-sub 26 (m) (motor) 2 × D-sub 15 (f) (sensor) | 2 × HD D-sub 26 (m) (motor/sensor) | ||
Recommended controllers / drivers | G-901.R319 C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | G-901.R319 SMC Hydra (double axis) ACS modular controller | G-901.R319 C-663.12 (single axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller |
Connecting cables are not in the scope of delivery and must be ordered separately.
Downloads
Datasheet
Documentation
Documentation
User Manual MP183
L-738 / V-738 Precision XY Stage
Version / Date
1.1.3 2020-06-30
pdf - 915 KB
Version / Date
1.1.3 2020-06-30
pdf - 924 KB
3-D Models
3-D Models
3-D model L-738
Version / Date
2018-07-16
zip - 9 MB
Separate connection cable required for motor and sensor connection respectively.
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.
L-738.051111
Precision XY stage, 380 mm × 380 mm width, 102 × 102 mm travel range, 150 × 150 mm clear aperture, stepper motor , incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period
L-738.051112
Precision XY stage, 380 mm × 380 mm width, 102 × 102 mm travel range, 150 × 150 mm clear aperture, stepper motor , incremental linear encoder with A/B quadrature signal transmission, 10 nm sensor signal period
L-738.053111
Precision XY stage, 380 mm × 380 mm width, 102 × 102 mm travel range, 150 × 150 mm clear aperture, DC motor , incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period
L-738.053112
Precision XY stage, 380 mm × 380 mm width, 102 × 102 mm travel range, 150 × 150 mm clear aperture, DC motor , incremental linear encoder with A/B quadrature signal transmission, 10 nm sensor signal period
L-738.053132
Precision XY stage, 380 mm × 380 mm width, 102 × 102 mm travel range, 150 × 150 mm clear aperture, DC motor, rotary encoder
