Precision linear stage, ball screw, 80 mm width, 25 mm travel range, ActiveDrive
M-404 Precision Linear Stage
High Cycle Number, Inexpensive
- Inexpensive, cost-optimized design for precise positioning
- Travel ranges from 25 to 200 mm
- Resolution to 0.012 µm
- Minimum incremental motion to 0.1 µm
- Recirculating ball screw provides high velocity and long lifetime
- Heavier loads with M-413 and M-414
Specifications
Specifications
Motion | M-404.1PD | M-404.2PD | M-404.4PD | M-404.6PD | M-404.8PD | M-404.1DG | M-404.2DG | M-404.4DG | M-404.6DG | M-404.8DG | M-404.12S | M-404.22S | M-404.42S | M-404.62S | M-404.82S | Tolerance |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Active axes | X | X | X | X | X | X | X | X | X | X | X | X | X | X | X | |
Travel range in X | 25 mm | 50 mm | 100 mm | 150 mm | 200 mm | 25 mm | 50 mm | 100 mm | 150 mm | 200 mm | 25 mm | 50 mm | 100 mm | 150 mm | 200 mm | |
Maximum velocity in X, unloaded | 50 mm/s | 50 mm/s | 50 mm/s | 50 mm/s | 50 mm/s | 1.5 mm/s | 1.5 mm/s | 1.5 mm/s | 1.5 mm/s | 1.5 mm/s | 3 mm/s | 3 mm/s | 3 mm/s | 3 mm/s | 3 mm/s | |
Pitch (Rotational crosstalk in θY with motion in X) | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | typ. |
Yaw (Rotational crosstalk in θZ with motion in X) | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | ± 200 µrad | typ. |
Positioning | M-404.1PD | M-404.2PD | M-404.4PD | M-404.6PD | M-404.8PD | M-404.1DG | M-404.2DG | M-404.4DG | M-404.6DG | M-404.8DG | M-404.12S | M-404.22S | M-404.42S | M-404.62S | M-404.82S | Tolerance |
Integrated sensor | Incremental rotary encoder | Incremental rotary encoder | Incremental rotary encoder | Incremental rotary encoder | Incremental rotary encoder | Incremental rotary encoder | Incremental rotary encoder | Incremental rotary encoder | Incremental rotary encoder | Incremental rotary encoder | ||||||
System resolution in X | 250 nm | 250 nm | 250 nm | 250 nm | 250 nm | 11.6494 nm | 11.6494 nm | 11.6494 nm | 11.6494 nm | 11.6494 nm | 156.25 nm | 156.25 nm | 156.25 nm | 156.25 nm | 156.25 nm | |
Unidirectional repeatability in X | 0.5 µm | 0.5 µm | 0.5 µm | 0.5 µm | 0.5 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | typ. |
Minimum incremental motion in X | 0.25 µm | 0.25 µm | 0.25 µm | 0.25 µm | 0.25 µm | 0.1 µm | 0.1 µm | 0.1 µm | 0.1 µm | 0.1 µm | 0.2 µm | 0.2 µm | 0.2 µm | 0.2 µm | 0.2 µm | typ. |
Backlash in X | 0.5 µm | 0.5 µm | 0.5 µm | 0.5 µm | 0.5 µm | 2 µm | 2 µm | 2 µm | 2 µm | 2 µm | 2 µm | 2 µm | 2 µm | 2 µm | 2 µm | typ. |
Sensor signal | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | ||||||
Sensor resolution | 4000 Cts./rev. | 4000 Cts./rev. | 4000 Cts./rev. | 4000 Cts./rev. | 4000 Cts./rev. | 2000 Cts./rev. | 2000 Cts./rev. | 2000 Cts./rev. | 2000 Cts./rev. | 2000 Cts./rev. | ||||||
Reference switch | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | |
Reference switch repeatability | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | 1 µm | |
Limit switches | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | Hall effect | |
Drive Properties | M-404.1PD | M-404.2PD | M-404.4PD | M-404.6PD | M-404.8PD | M-404.1DG | M-404.2DG | M-404.4DG | M-404.6DG | M-404.8DG | M-404.12S | M-404.22S | M-404.42S | M-404.62S | M-404.82S | Tolerance |
Drive type | DC motor with ActiveDrive | DC motor with ActiveDrive | DC motor with ActiveDrive | DC motor with ActiveDrive | DC motor with ActiveDrive | DC motor | DC motor | DC motor | DC motor | DC motor | 2-phase stepper motor | 2-phase stepper motor | 2-phase stepper motor | 2-phase stepper motor | 2-phase stepper motor | |
Nominal voltage | 24 V | 24 V | 24 V | 24 V | 24 V | 12 V | 12 V | 12 V | 12 V | 12 V | 24 V | 24 V | 24 V | 24 V | 24 V | |
Drive force in negative direction of motion in X | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | typ. |
Drive force in positive direction of motion in X | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | typ. |
Nominal current, RMS | 0.43 A | 0.43 A | 0.43 A | 0.43 A | 0.43 A | 1.2 A | 1.2 A | 1.2 A | 1.2 A | 1.2 A | typ. | |||||
Resistance phase-phase | 9.6 Ω | 9.6 Ω | 9.6 Ω | 9.6 Ω | 9.6 Ω | 2.6 Ω | 2.6 Ω | 2.6 Ω | 2.6 Ω | 2.6 Ω | typ. | |||||
Inductance phase-phase | 0.44 mH | 0.44 mH | 0.44 mH | 0.44 mH | 0.44 mH | 1.9 mH | 1.9 mH | 1.9 mH | 1.9 mH | 1.9 mH | ||||||
Motor resolution | 400 Full steps/rev. | 400 Full steps/rev. | 400 Full steps/rev. | 400 Full steps/rev. | 400 Full steps/rev. | |||||||||||
Mechanical Properties | M-404.1PD | M-404.2PD | M-404.4PD | M-404.6PD | M-404.8PD | M-404.1DG | M-404.2DG | M-404.4DG | M-404.6DG | M-404.8DG | M-404.12S | M-404.22S | M-404.42S | M-404.62S | M-404.82S | Tolerance |
Drive screw type | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | Ball screw | |
Drive screw pitch | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | 1 mm | |
Stiffness in X | 3 N/µm | 3 N/µm | 3 N/µm | 3 N/µm | 3 N/µm | 3 N/µm | 3 N/µm | 3 N/µm | 3 N/µm | 3 N/µm | 3 N/µm | 3 N/µm | 3 N/µm | 3 N/µm | 3 N/µm | |
Permissible push force in Y | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | max. |
Permissible push force in Z | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | 200 N | max. |
Overall mass | 1800 g | 1900 g | 2200 g | 2300 g | 2600 g | 1800 g | 1900 g | 2200 g | 2300 g | 2600 g | 1800 g | 1900 g | 2200 g | 2300 g | 2600 g | |
Material | Aluminum, anodized | Aluminum, anodized | Aluminum, anodized | Aluminum, anodized | Aluminum, anodized | Aluminum, anodized | Aluminum, anodized | Aluminum, anodized | Aluminum, anodized | Aluminum, anodized | Aluminum, anodized | Aluminum, anodized | Aluminum, anodized | Aluminum, anodized | Aluminum, anodized | |
Gear ratio i | 42,921 | 42,921 | 42,921 | 42,921 | 42,921 | |||||||||||
Miscellaneous | M-404.1PD | M-404.2PD | M-404.4PD | M-404.6PD | M-404.8PD | M-404.1DG | M-404.2DG | M-404.4DG | M-404.6DG | M-404.8DG | M-404.12S | M-404.22S | M-404.42S | M-404.62S | M-404.82S | Tolerance |
Connector | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | |
Connector for supply voltage | M8 4-pin (m) | M8 4-pin (m) | M8 4-pin (m) | M8 4-pin (m) | M8 4-pin (m) | |||||||||||
Recommended controllers / drivers | C-863 (single axis) C-884 (up to 6 axes) | C-863 (single axis) C-884 (up to 6 axes) | C-863 (single axis) C-884 (up to 6 axes) | C-863 (single axis) C-884 (up to 6 axes) | C-863 (single axis) C-884 (up to 6 axes) | C-863 (single axis) C-884 (up to 6 axes) | C-863 (single axis) C-884 (up to 6 axes) | C-863 (single axis) C-884 (up to 6 axes) | C-863 (single axis) C-884 (up to 6 axes) | C-863 (single axis) C-884 (up to 6 axes) | C-663 (single axis) | C-663 (single axis) | C-663 (single axis) | C-663 (single axis) | C-663 (single axis) | |
Cable length | 3 m | 3 m | 3 m | 3 m | 3 m | 3 m | 3 m | 3 m | 3 m | 3 m | 3 m | 3 m | 3 m | 3 m | 3 m | |
Operating temperature range | -20 to 65 °C | -20 to 65 °C | -20 to 65 °C | -20 to 65 °C | -20 to 65 °C | -20 to 65 °C | -20 to 65 °C | -20 to 65 °C | -20 to 65 °C | -20 to 65 °C | -20 to 65 °C | -20 to 65 °C | -20 to 65 °C | -20 to 65 °C | -20 to 65 °C |
Note on the sensor resolution: Quadruple evaluated
Note on the permissible push force in Z: Maximum possible normal load capacity, centered, vertical load (linear stage installed horizontally)
Note on the motor resolution and drive type for M-404.x2S: Maximum 0.85 A/phase; 400 full steps/rev., motor resolution with C-663 stepper motor controller
Downloads
Datasheet
Documentation
User Manual MP79
M-404 Precision Linear Stage
Technical Note M404T0008
M-404.xVP / M-404.xVG Precision Translation Stages for Vacuum Applications (p > 1 E -6 mbar)
3-D Models
M-404 3-D model
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