M-404 Precision Linear Stage

with ActiveDrive

with DC gear motor

with stepper motor

Active axes

X

X

X

Travel range

25 / 50 / 100 / 150 / 200

25 / 50 / 100 / 150 / 200

25 / 50 / 100 / 150 / 200

mm

Integrated sensor

Rotary encoder

Rotary encoder

-

Sensor resolution

4000

2000

-

Cts./rev.

Design resolution

0.25

0.012

0.16

µm

typ.

Minimum incremental motion

0.25

0.1

0.2

µm

typ.

Backlash

0.5

2

2

µm

typ.

Unidirectional repeatability

0.5

1

1

µm

typ.

Pitch

75

75

75

µrad

typ. over 100 mm

Yaw

75

75

75

µrad

typ. over 100 mm

Velocity

50

1.5

3

mm/s

max.

Reference switch repeatability

1

1

1

µm

typ.

Drive screw pitch

1

1

1

mm

Gear ratio

–

2704:63

-

Motor resolution

–

–

6400 ⁽¹⁾

steps/rev.

Stiffness in motion direction

3

3

3

N/µm

±20 %

Load capacity ⁽²⁾

200

200

200

N

max.

Push/pull force

50

50

50

N

max.

Lateral force

100

100

100

N

max.

Drive type

DC motor, ActiveDrive

DC gear motor

2-phase stepper motor ⁽¹⁾

Operating voltage

24

0 to ±12

24

V

Motor power

26

2.5

4.8

W

nominal

Operating temperature range

-20 to 65 °C

-20 to 65 °C

-20 to 65 °C

Material

Al (black anodized)

Al (black anodized)

Al (black anodized)

Mass

1.8 / 1.9 /2.2 / 2.3 /2.6

1.8 / 1.9 /2.2 / 2.3 /2.6

1.8 / 1.9 /2.2 / 2.3 /2.6

kg

±5 %

Connector

D-sub 15 (m)

D-sub 15 (m)

D-sub 15 (m)

Recommended controllers/drivers

C-863

C-884

C-863

C-884

C-663