M-413 High-Load Linear Stage

with ActiveDrive

with DC gear motor

with stepper motor

Active axes

X

X

X

Travel range

100 / 200 / 300

100 / 200 / 300

100 / 200 / 300

mm

Integrated sensor

Rotary encoder

Rotary encoder

-

Sensor resolution

4000

2000

-

Cts./rev.

Design resolution

0.25

0.018

0.16

µm

typ.

Minimum incremental motion

0.25

0.2

0.2

µm

typ.

Backlash

6

10

6

µm

typ.

Unidirectional repeatability

1

1

1

µm

typ.

Pitch / yaw ⁽¹⁾

300

300

300

µrad

typ. over 100 mm

Velocity

10 ⁽²⁾

2.5

3

mm/s

max.

Reference switch repeatability

1

1

1

µm

typ.

Drive screw pitch

1

1

1

mm

Gear ratio

–

2304:81

-

Motor resolution

-

-

6400 ⁽³⁾

Steps/rev.

Stiffness in motion direction

3.5

3.5

3.5

N/µm

±20 %

Load capacity

500

500

500

N

max.

Push/pull force

50

50

50

N

max.

Lateral force

200

200

200

N

max.

Drive type

DC motor, ActiveDrive

DC gear motor

2-phase stepper motor ⁽³⁾

Operating voltage

24

0 to ±12

24

V

Motor power

70

3.6

4.8

W

nominal

Operating temperature range

-20 to 65

-20 to 65

-20 to 65

°C

Material

Al (black anodized)

Al (black anodized)

Al (black anodized)

Mass

4.4 / 5.4 / 6.6

4.2 / 5.2 / 6.4

4.4 / 5.4 / 6.6

kg

±5 %

Connector

D-sub 15 (m)

D-sub 15 (m)

D-sub 15 (m)

Recommended controllers/drivers

C-863

C-884

C-863

C-884

C-663