M-971 Motorized OEM XY Stage

Low Price with High Quantities

XY stage for the price-sensitive applications
Precise stepper motors
Crossed roller guides
Limit and reference switches (Hall effect)

M-971.01

The M-971 is integrated into systems for inspection, lithography, or biomedical engineering and is optimized for optical microscopy. It was specially developed to meet the requirements of price-sensitive OEM markets. Proven and cost-optimized components form its basis:

The design of the guides which includes several short crossed roller guides distributes the load evenly over a large surface and ensures high stiffness and good travel accuracy.
The drivetrain is based on a widely used linear stage from PI. Its reliability and long lifetime have been proven in use for years.
By using stepper motors, encoders can be dispensed with and a simple stepper motor controller can be used. The XY stage is equipped with limit and reference switches to ensure fast and precise referencing and safety during operation.

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Datasheet

Version / Date

2021-01-14

pdf - 207 KB

Version / Date

2021-01-14

pdf - 210 KB

Version / Date

2021-01-18

pdf - 275 KB

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Motion and positioning	Unit	Tolerance	M-971.01
Active axes			X, Y
Travel range in X	mm		50
Travel range in Y	mm		25
System resolution in X	nm		2.5
System resolution in Y	nm		2.5
Minimum incremental motion in X	µm	Typ.	0.2
Minimum incremental motion in Y	µm	Typ.	0.2
Unidirectional repeatability in X	µm	Typ.	1
Unidirectional repeatability in Y	µm	Typ.	1
Backlash in X	µm	Typ.	6
Backlash in Y	µm	Typ.	6
Velocity in X	mm/s	Max.	10
Velocity in Y	mm/s	Max.	10
Reference switch			Hall effect
Reference switch repeatability	µm	Typ.	1
Limit switches			Hall effect
Rotational crosstalk in θY with motion in X	µrad	Typ.	±50
Rotational crosstalk in θZ with motion in X	µrad	Typ.	±50
Rotational crosstalk in θX with motion in Y	µrad	Typ.	±50
Rotational crosstalk in θZ with motion in Y	µrad	Typ.	±50

Mechanical properties	Unit	Tolerance	M-971.01
Drive screw type			Leadscrew
Drive screw pitch	mm		1
Guide type			Crossed roller guide
Drive force in X	N		50
Drive force in Y	N		50
Holding force in X, passive	N		200
Holding force in Y, passive	N		200
Load capacity	N		200
Overall mass	g	±5 %	8460