L-731 Precision XY Stage

High Travel Accuracy and Stability

L-731 Precision XY Stage

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Travel range 205 mm × 205 mm (8")
Unidirectional repeatability to 0.05 µm
Velocity to 90 mm/s
2-phase stepper motor or DC motors
Incremental linear encoder with 1 nm resolution
Rotary encoder with 20000 impulses/revolutions

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Optical limit and reference point switches.

With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep.

2-phase stepper motor for high torque even at low velocities and higher resolution
DC motor for high velocity constancy, low vibration, and high velocities

Other travel ranges on request.

Medical industry, Laser cutting, Biotechnology, Metrology, Laser marking

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Datasheet L-731

Version / Date

2018-02-05

Version / Date

2018-02-05

Version / Date

2017-10-09

Document language

Download

pdf - 695 KB

Download

pdf - 702 KB

Download

pdf - 1 MB

Stages with DC motor

Motion	L-731.093111 / L-731.093112 / L-731.093132	Unit	Tolerance
Active axes	X, Y
Travel range	205 × 205	mm
Angular error xry (pitch)	±50	µrad	typ.
Angular error xrz (yaw)	±30	µrad	typ.
Angular error yrx (pitch)	±40	µrad	typ.
Angular error yrz (yaw)	±30	µrad	typ.
Straightness / flatness	±2	µm	typ.
Orthogonality	±96.963	µrad	typ.
Velocity	L-731.093111 / L-731.093112: 50 L-731.093132: 90	mm/s	max.

Positioning	L-731.093111	L-731.093112	L-731.093132	Unit	Tolerance
Integrated sensor	Incremental linear encoder	Incremental linear encoder	Incremental rotary encoder
Sensor signal	Sin/cos, 1 V peak-peak, 20 µm signal period	A/B quadrature, TTL	A/B quadrature, TTL
Design resolution	0.001	0.01	0.1	µm
Sensor resolution rotary encoder	–	–	20000	Cts./rev.
Minimum incremental motion	0.1	0.5	0.8	µm	typ.
Unidirectional repeatability	0.1	0.5	0.8	µm	typ.
Bidirectional repeatability	±0.5	±0.5	±2.5	µm	typ.
Reference point switch repeatability	<1	<1	<1	µm	typ.
Reference and limit switches	Optical	Optical	Optical

Mechanical properties	L-731.093xxx	Unit	Tolerance
Drive screw type	Ball screw
Drive screw pitch	2	mm
Guide type	Crossed roller guide with anti-creep system
Load capacity	200	N	max.
Permissible torque Mx in θ_X	125	N·m	max.
Permissible torque My in θ_Y	125	N·m	max.
Permissible torque Mz in θ_Z	125	N·m	max.

Drive properties	L-731.093xxx	Unit	Tolerance
Motor type	DC motor
Operating voltage, nominal	24	V	nom.
Operating voltage, max.	48	V	max.

Miscellaneous	L-731.093111	L-731.093112 / L-731.093132	Unit	Tolerance
Operating temperature range	5 to 40	5 to 40	°C
Material	Aluminum, black anodized	Aluminum, black anodized
Mass	16	16	kg	±5 %
Moved mass in X, unloaded	12	12	kg	±5 %
Moved mass in Y, unloaded	3.5	3.5	kg	±5 %
Connection	2 × HD Sub-D 26 (m) (motor) 2 × Sub-D 15 (f) (sensor)	2 × HD Sub-D 26 (m) (motor/sensor)
Recommended controllers/drivers	SMC Hydra (double axis) C-891 (single axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller	C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller

Stages with stepper motor

Motion	L-731.40SD / L-731.44SD / L-731.4ASD	Unit	Tolerance
Active axes	X, Y
Travel range	205 × 205	mm
Angular error xry (pitch)	±50	µrad	typ.
Angular error xrz (yaw)	±30	µrad	typ.
Angular error yrx (pitch)	±40	µrad	typ.
Angular error yrz (yaw)	±30	µrad	typ.
Straightness / flatness	±2	µm	typ.
Orthogonality	±96.963	µrad	typ.
Velocity	45	mm/s	max.

Positioning	L-731.40SD	L-731.44SD	L-731.4ASD	Unit	Tolerance
Integrated sensor	–	Incremental linear encoder	Incremental linear encoder
Sensor signal	–	A/B quadrature, TTL	Sin/cos, 1 V peak-peak, 20 µm signal period
Design resolution	10.0	0.01	0.001	µm
Minimum incremental motion	1	0.05	0.05	µm	typ.
Unidirectional repeatability	1	0.05	0.05	µm	typ.
Bidirectional repeatability	±2.5	±0.5	±0.5	µm	typ.
Reference and limit switches	Optical	Optical	Optical

Mechanical properties	L-731.4xSD	Unit	Tolerance
Drive screw type	Ball screw
Drive screw pitch	2	mm
Guide type	Crossed roller guide with anti-creep system
Load capacity	200	N	max.
Permissible torque Mx in θ_X	125	N·m	max.
Permissible torque My in θ_Y	125	N·m	max.
Permissible torque Mz in θ_Z	125	N·m	max.

Drive properties	L-731.4xSD	Unit	Tolerance
Motor type	Stepper motor, 2-phase
Operating voltage, nominal	24	V	nom.
Operating voltage, max.	48	V	max.
Stepper motor	200	Full steps/rev.

Miscellaneous	L-731.40SD / L-731.44SD	L-731.4ASD	Unit	Tolerance
Operating temperature range	5 to 40	5 to 40	°C
Material	Aluminum, black anodized	Aluminum, black anodized
Mass	15.5	15.5	kg	±5 %
Moved mass in X, unloaded	12	12	kg	±5 %
Moved mass in Y, unloaded	3.5	3.5	kg	±5 %
Connection	L-731.40SD: 2 × HD Sub-D 26 (m) (motor) L-731.44SD: 2 × HD Sub-D 26 (m) (motor/sensor)	2 × HD Sub-D 26 (m) (motor) 2 × Sub-D 15 (f) (sensor)
Recommended controllers/drivers	C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller	SMC Hydra (double axis) ACS modular controller

All cables required for operation with the recommended controller are included in the scope of delivery. The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.

Download datasheet Go to download

Datasheet L-731

Version / Date

2018-02-05

Version / Date

2018-02-05

Version / Date

2017-10-09

Document language

Download

pdf - 695 KB

Download

pdf - 702 KB

Download

pdf - 1 MB

Short Instructions MP146EK

Stages with Electric Motors: DT-xx / ES-100 / HPS-170 / L-xxx / LS-xx / LS-xxx / MTS-65 / NPE-200 / PLS-85 / PRS-xxx / RS-40 / UPL-120 / UPM-160 / VT-80

Version / Date

1.5.0 October 2017

Download

pdf - 395 KB

User Manual MP158

L-731 / V-731 Precision XY Stage

Version / Date

2017-04-11

Version / Date

2017-04-11

Document language

Download

pdf - 1 MB

Download

pdf - 1 MB

L-731 STEP

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L-731.40SD

Precision XY stage, 310 mm × 310 mm width, 205 mm × 205 mm travel range, 2-phase stepper motor

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L-731.4ASD

Precision XY stage, 310 mm × 310 mm width, 205 mm × 205 mm travel range, 2-phase stepper motor, linear encoder with sin/cos signal transmission, 20 µm sensor signal period

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L-731.44SD

Precision XY stage, 310 mm × 310 mm width, 205 mm × 205 mm travel range, 2-phase stepper motor, linear encoder with A/B quadrature signal transmission, 10 nm sensor resolution

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L-731.093130

Precision XY stage, 310 mm × 310 mm width, 205 mm × 205 mm travel range, DC motor, rotary encoder

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L-731.093111

Precision XY stage, 310 mm × 310 mm width, 205 mm × 205 mm travel range, DC motor, linear encoder with sin/cos signal transmission, 20 µm sensor signal period

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L-731.093112

Precision XY stage, 310 mm × 310 mm width, 205 mm × 205 mm travel range, DC motor, linear encoder with A/B quadrature signal transmission, 10 nm sensor resolution

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