L-731 Precision XY Stage

High Travel Accuracy and Stability

Travel range 205 mm × 205 mm (8")
Unidirectional repeatability to 0.05 µm
Velocity to 90 mm/s
2-phase stepper motor or DC motors
Incremental linear encoder with 1 nm resolution
Rotary encoder with 20000 impulses/revolution

L-731, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement. Optical limit and reference switches. Further travel ranges on request.

With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep.

2-phase stepper motor for high torque even at low velocities and higher resolution
DC motor for high velocity constancy, low vibration, and high velocities

Medical industry. Laser cutting. Biotechnology. Metrology. Laser marking.

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Datasheet

Version / Date

2020-09-16

pdf - 1 MB

Version / Date

2020-09-16

pdf - 1 MB

Version / Date

2021-01-18

pdf - 485 KB

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Stages with DC motor

Motion	L-731.093111 / L-731.093112 / L-731.093132	Unit	Tolerance
Active axes	X, Y
Travel range	205 × 205	mm
Angular error xry (pitch)	±75	µrad	Typ.
Angular error xrz (yaw)	±30	µrad	Typ.
Angular error yrx (pitch)	±75	µrad	Typ.
Angular error yrz (yaw)	±30	µrad	Typ.
Straightness / flatness	±2	µm	Typ.
Orthogonality	±96.963	µrad	Typ.
Velocity	L-731.093111 / L-731.093112: 50 L-731.093132: 90	mm/s	Max.

Positioning	L-731.093111	L-731.093112	L-731.093132	Unit	Tolerance
Integrated sensor	Incremental linear encoder	Incremental linear encoder	Incremental rotary encoder
Sensor signal	Sin/cos, 1 V peak-peak, 20 µm signal period	A/B quadrature, TTL	A/B quadrature, TTL
Design resolution	0.001	0.01	0.1	µm
Sensor resolution rotary encoder	–	–	20000	Cts./rev.
Minimum incremental motion	0.1	0.5	0.8	µm	Typ.
Unidirectional repeatability	0.1	0.5	0.8	µm	Typ.
Bidirectional repeatability	±0.5	±0.5	±2.5	µm	Typ.
Reference switch repeatability	<1	<1	<1	µm	Typ.
Reference and limit switches	Forked photoelectric sensor, N/C contact, 5V, NPN	Forked photoelectric sensor, N/C contact, 5V, NPN	Forked photoelectric sensor, N/C contact, 5V, NPN

Mechanical properties	L-731.093xxx	Unit	Tolerance
Drive screw type	Ball screw
Drive screw pitch	2	mm
Guide type	Crossed roller guide with anti-creep system
Push/pull force F_X, F_Y power on	100	N	Max.
Load Capacity	200	N	Max.
Permissible torque M_X in θ_X	125	Nm	Max.
Permissible torque M_Y in θ_Y	125	Nm	Max.
Permissible torque M_z in θ_Z	125	Nm	Max.

Drive properties	L-731.093xxx	Unit	Tolerance
Motor type	DC motor
Operating voltage, nominal	24	V	Nom.
Operating voltage, max.	48	V	Max.

Miscellaneous	L-731.093111	L-731.093112 / L-731.093132	Unit	Tolerance
Operating temperature range	5 to 40	5 to 40	°C
Material	Aluminum, black anodized	Aluminum, black anodized
Mass	16	16	kg	±5 %
Moved mass in X, unloaded	12	12	kg	±5 %
Moved mass in Y, unloaded	3.5	3.5	kg	±5 %
Connector	2 × HD D-sub 26 (m) (motor) 2 × D-sub 15 (f) (sensor)	2 × HD D-sub 26 (m) (motor/sensor)
Recommended controllers / drivers	G-901.R319 SMC Hydra (double axis) C-891 (single axis) C-885 with C-891.11C885 (up to 20 axes) ACS modular controller	G-901.R319 C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller

Stages with stepper motor

Motion	L-731.40SD / L-731.44SD / L-731.4ASD	Unit	Tolerance
Active axes	X, Y
Travel range	205 × 205	mm
Angular error xry (pitch)	±75	µrad	Typ.
Angular error xrz (yaw)	±30	µrad	Typ.
Angular error yrx (pitch)	±75	µrad	Typ.
Angular error yrz (yaw)	±30	µrad	Typ.
Straightness / flatness	±2	µm	Typ.
Orthogonality	±96.963	µrad	Typ.
Velocity	45	mm/s	Max.

Positioning	L-731.40SD	L-731.44SD	L-731.4ASD	Unit	Tolerance
Integrated sensor	–	Incremental linear encoder	Incremental linear encoder
Sensor signal	–	A/B quadrature, TTL	Sin/cos, 1 V peak-peak, 20 µm signal period
Design resolution	10.0	0.01	0.001	µm
Minimum incremental motion	1	0.05	0.05	µm	Typ.
Unidirectional repeatability	1	0.05	0.05	µm	Typ.
Bidirectional repeatability	±2.5	±0.5	±0.5	µm	Typ.
Reference and limit switches	Forked photoelectric sensor, N/C contact, 5V, NPN	Forked photoelectric sensor, N/C contact, 5V, NPN	Forked photoelectric sensor, N/C contact, 5V, NPN

Mechanical properties	L-731.4xSD	Unit	Tolerance
Drive screw type	Ball screw
Drive screw pitch	2	mm
Guide type	Crossed roller guide with anti-creep system
Push/pull force F_X, F_Y power on	100	N	Max.
Load Capacity	200	N	Max.
Permissible torque M_X in θ_X	125	Nm	Max.
Permissible torque M_Y in θ_Y	125	Nm	Max.
Permissible torque M_z in θ_Z	125	Nm	Max.

Drive properties	L-731.4xSD	Unit	Tolerance
Motor type	Stepper motor, 2-phase
Operating voltage, nominal	24	V	Nom.
Operating voltage, max.	48	V	Max.
Stepper motor	200	Full steps/rev.

Miscellaneous	L-731.40SD / L-731.44SD	L-731.4ASD	Unit	Tolerance
Operating temperature range	5 to 40	5 to 40	C
Material	Aluminum, black anodized	Aluminum, black anodized
Mass	15.5	15.5	kg	±5 %
Moved mass in X, unloaded	12	12	kg	±5 %
Moved mass in Y, unloaded	3.5	3.5	kg	±5 %
Connector	L-731.40SD: 2 × HD D-sub 26 (m) (motor) L-731.44SD: 2 × HD D-sub 26 (m) (motor/sensor)	2 × HD D-sub 26 (m) (motor) 2 × D-sub 15 (f) (sensor)
Recommended controllers / drivers	G-901.R319 C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller	G-901.R319 SMC Hydra (double axis) ACS modular controller

Connecting cables are not in the scope of delivery and must be ordered separately.

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Product Note

Version / Date

2021-04-19

pdf - 917 KB

English

Download

Datasheet

Version / Date

2020-09-16

pdf - 1 MB

Version / Date

2020-09-16

pdf - 1 MB

Version / Date

2021-01-18

pdf - 485 KB

Download

Documentation

L-731 / V-731 Precision XY Stage

Version / Date

1.1.2 2020-06-30

pdf - 1 MB

Version / Date

1.1.2 2020-06-30

pdf - 1 MB

Documentation

Positioners with Electric Motors: DT-xx / HPS-170 / L-xxx / LS-xxx / MTS-65 / PRS-xxx / RS-40 / UPL-120 / VT-80 / WT-xx / WT-xxx

Version / Date

2.0.0 01/2020

pdf - 736 KB

Version / Date

2.0.0 01/2020

pdf - 749 KB

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3-D Models

zip - 4 MB

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Separate connection cable required for motor and sensor connection respectively.

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

L-731.40SD

Precision XY stage, 310 mm × 310 mm width, 205 mm × 205 mm travel range, 2-phase stepper motor

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L-731.4ASD

Precision XY stage, 310 mm × 310 mm width, 205 mm × 205 mm travel range, 2-phase stepper motor , linear encoder with sin/cos signal transmission, 20 µm sensor signal period

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L-731.44SD

Precision XY stage, 310 mm × 310 mm width, 205 mm × 205 mm travel range, 2-phase stepper motor , linear encoder with A/B quadrature signal transmission, 10 nm sensor resolution

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L-731.093132

Precision XY stage, 310 mm × 310 mm width, 205 mm × 205 mm travel range, DC motor, rotary encoder

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L-731.093111

Precision XY stage, 310 mm × 310 mm width, 205 mm × 205 mm travel range, DC motor , linear encoder with sin/cos signal transmission, 20 µm sensor signal period

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L-731.093112

Precision XY stage, 310 mm × 310 mm width, 205 mm × 205 mm travel range, DC motor , linear encoder with A/B quadrature signal transmission, 10 nm sensor resolution

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